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专利名称：HOLDER FOR A SUBSTRATE CASSETTE AND
DEVICE PROVIDED WITH SUCH A HOLDER
发明人：VAN DER TOORN, Karel-Jan申请号：EP01953960.0申请日：20010525公开号：EP1214734B1公开日：20060927
摘要：The invention relates to a holder (10) for a cassette (1) for substrates (2),comprising a base plate (3) on which a guide member (4) provided with at least twoguides (5) is secured. The cassette (1) is to be positioned between the guides (5), whichenable the cassette (1) to be aligned with respect to the base plate (3), and the side (6) ofwhich facing the base plate (3) tapers inwards and downwards. The application of such aholder (10) in an apparatus for manufacturing semiconductor devices is still hampered asa result of incorrectly positioning the holder (10) in said apparatus, leading to damage tothe substrates (2) and a lower yield of the manufacturing process.A holder (10) accordingto the invention is characterized in that the side (7) of the guide member (4) tapersinwards and upwards. By virtue of this measure, the cassette (1) can be positioned moreaccurately and reproducibly into the holder (10). In this way, damage to substrates (2) isavoided and the yield is high. Preferably, the guide member (4) is mirror symmetrical andcomprises, preferably, two separate guide members (4A, 4B), which are mirrorsymmetrical as well. As a result, the holder (10) can be mounted, adjusted andmanufactured in a simple and inexpensive manner.
申请人：KONINKL PHILIPS ELECTRONICS NV
地址：NL
国籍：NL
代理机构：van der Veer, Johannis Leendert
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