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专利名称：Method for producing thin film sensors,
especially hot film anemometters andhumidity sensors
发明人：Wolfgang Timelthaler申请号：US10451583申请日：20040105
公开号：US20040113751A1公开日：20040617
专利附图：
摘要：A method for producing thin film sensors that includes applying a sensorstructure to a front of a glass substrate so as to define a combination, connecting a
support on a front of the combination. The method further includes removing a portionof the glass substrate over a large surface from a direction directed from a back of thecombination down to a final thickness (d) of the glass substrate and releasing aconnection between the support and the combination.
申请人：TIMELTHALER WOLFGANG
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