专利内容由知识产权出版社提供
专利名称：Apparatus for measuring contamination of
the surface of a machine surface
发明人：Ikuhiro Fujita申请号：US095672申请日：20000509公开号：US008701B1公开日：20020625
专利附图：
摘要：A surface contamination measuring apparatus has a suction means for sucking inair from the proximity of an object under measurement, a measurement section formeasuring the amount and composition of sucked-in particles, a discharging means for
discharging a fluid onto the surface of the object under measurement, a samplingmember brought into proximity to surface of the object under measurement, and ablocking member made of a flexible member at the periphery of the sampling member,and can efficiently capture particles that has become attached to the surface undermeasurement.
申请人：NEC CORPORATION
代理机构：Hutchins, Wheeler & Dittmar
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