专利内容由知识产权出版社提供
专利名称：OPTICAL INTEGRATOR, ILLUMINATION
OPTICAL DEVICE, EXPOSURE DEVICE, ANDEXPOSURE METHOD
发明人：KOMATSUDA, HIDEKI申请号：EP06712307申请日：20060125公开号：EP1811547A4公开日：20100602
摘要：An optical integrator of a wavefront dividing type permits an arbitrary distanceto be set between an entrance surface and an exit surface, without production of
aberration and without reduction in reflectance on reflecting films. The optical integratorhas a plurality of first focusing elements (first concave reflector elements 18a) arrangedin parallel, a plurality of second focusing elements (second concave reflector elements20a) arranged in parallel so as to correspond to the first focusing elements, and a relayoptical system (19) disposed in an optical path between the first focusing elements andthe second focusing elements. The relay optical system refocuses a light beam focusedvia one of the first focusing elements, on or near a corresponding second focusingelement so as to establish an imaging relation of one-to-one correspondence betweenone of the first focusing elements and one of the second focusing elements.
申请人：NIKON CORPORATION
更多信息请下载全文后查看
